The very first Super Bowl occurred in 1967; but until the 1990s it was mostly college marching bands and drill teams performing during the halftime show. Of course, recently it has been a who’s who—including The Who—of performers that have graced the halftime stage for the big game. Here are some of the most memorable Super Bowl halftime performances ever.

 

Michael Jackson (Super Bowl XXVII)

 

PHOTO: STEVE GRANITZ / CONTRIBUTOR

 

In an effort to beat the ratings of Super Bowl counterprogramming like InLiving Color, the NFL booked the King of Pop for 1993’s Super Bowl halftime show. Jackson’s stellar performance set the bar incredibly high for future performers to measure up to.

 

Janet Jackson, P. Diddy, Nelly, Kid Rock, and Justin Timberlake (Super Bowl XXXVIII)

 

PHOTO: JEFF KRAVITZ / CONTRIBUTOR

 

Super Bowl XXXVIII in 2004 will forever be known for Janet Jackson’s XXX-rated “wardrobe malfunction” when Justin Timberlake took his song “Rock Your Body”‘s lyrics—”I’m going to get you naked by the end of this song”—a little too literally. The event was foreshadowed—maybe?— by Nelly’s performance of “Hot in Herre.”

 

Paul McCartney (Super Bowl XXXIX)

 

PHOTO: KEVIN MAZUR / CONTRIBUTOR

 

Hoping the previous year’s wardrobe malfunction controversy would live and let die, the NFL booked former Beatle and musical icon Paul McCartney to play the halftime show in 2005.

 

Bruno Mars with special guests Red Hot Chili Peppers (XLVIII)

 

PHOTO: JAMIE SQUIRE / STAFF

 

Accompanied by his band The Hooligans, in 2014 Bruno Mars became the youngest performer to headline a Super Bowl. Despite Mars’ youth, the performance, with help from the Red Hot Chili Peppers, was nominated for a Primetime Emmy.

 

The Rolling Stones (Super Bowl XL)

 

PHOTO: AL MESSERSCHMIDT / STAFF

 

Super Bowl XL’s larger-than-life halftime show could make a grown man cry. The 2006 audience found satisfaction with the performance of headliners The Rolling Stones. And who wouldn’t, with Mick Jagger on hand to show off his moves?

 

Katy Perry with special guests Lenny Kravitz and Missy Elliot (Super Bowl XLIX)

 

PHOTO: ROB CARR / STAFF

 

Reminiscent of a recent fever dream, Katy Perry’s 2015 performanceincluded Lenny Kravitz, Missy Elliot (who put it down), a giant mechanical tiger, dancing sharks, and some pretty sweet 3-D graphics on the football field.

 

The Who (Super Bowl XLIV)

 

PHOTO: MICHAEL ZAGARIS / CONTRIBUTOR

Who better than The Who to rock Sun Life Stadium during the 2010 Super Bowl halftime show? I tip my hat to Roger Daltrey and Pete Townshend for this classic performance from a classic band.

 

Beyoncé with Special Guests Destiny’s Child (Super Bowl XLVII)

 

PHOTO: AL PEREIRA / CONTRIBUTOR

 

Even in the male-dominated NFL, Beyoncé continues to rule the world. Joined by her former girl group, Destiny’s Child, Beyoncé’s 2013 performance was one of the most-tweeted-about moments in history.

 

Aerosmith, ‘N Sync, Britney Spears, Mary J. Blige, Nelly (Super Bowl XXXV)

 

PHOTO: KMAZUR / CONTRIBUTOR

 

The 2001 Super Bowl show was one for the ages: Aerosmith, Britney Spears, ‘N Sync, Nelly, AND Mary J. Blige? This halftime show had a little something for everybody.

 

U2 (Super Bowl XXXVI)

 

PHOTO: KMAZUR / CONTRIBUTOR

 

U2 rocked the 2002 halftime show in a touching tribute to those killed in the 9/11 attacks.

 

Tom Petty & the Heartbreakers (XLII)

 

PHOTO: JEFF KRAVITZ / CONTRIBUTOR

 

Rock-and-roll fans were anything but heartbroken after the 2008 Tom Petty & the Heartbreakers Super Bowl halftime performance.

 

Madonna with Special Guests LMFAO, Nicki Minaj, M.I.A. and CeeLo Green (Super Bowl XLVI)

 

PHOTO: JEFF KRAVITZ / CONTRIBUTOR

 

Familiar with controversial performances (see here and here), Madonna was surprisingly MIA from 2012’s halftime show controversy involving M.I.A. flipping off the entire audience.